High-precision semiconductor wafer parallel XY stage
A wafer-oriented XY stage that achieves high-precision drive and high-precision positioning by leveraging the features of shaft motors.
※Exhibiting at SEMICON Japan from December 11 to 13, 2024, at Booth #3121! The shaft motor is a linear motor that achieves high-precision drive and high-precision positioning. This XY stage features… ♦ Parallel drive for both the upper and lower axes (driven by two motors with one amplifier and one set of encoders) ♦ A hollow structure stage made possible by the parallel drive ♦ A low-profile, simple structure XY stage that eliminates waste ♦ Customizable shaft motors that meet your desired load and operating conditions.
- Company：ジイエムシーヒルストン
- Price：Other
